发明授权
US08059884B2 Method and system for obtaining bounds on process parameters for OPC-verification
有权
用于获取OPC验证过程参数界限的方法和系统
- 专利标题： Method and system for obtaining bounds on process parameters for OPC-verification
- 专利标题（中）： 用于获取OPC验证过程参数界限的方法和系统
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申请号： US11937073申请日： 2007-11-08
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公开(公告)号： US08059884B2公开(公告)日： 2011-11-15
- 发明人: Maharaj Mukherjee , Ioana Graur , Alan E. Rosenbluth
- 申请人： Maharaj Mukherjee , Ioana Graur , Alan E. Rosenbluth
- 申请人地址： US NY Armonk
- 专利权人： International Business Machines Corporation
- 当前专利权人： International Business Machines Corporation
- 当前专利权人地址： US NY Armonk
- 代理商 Yuanmin Cai
- 主分类号： G06K9/20
- IPC分类号： G06K9/20
摘要：
Embodiments of the present invention provide a method of performing printability verification of a mask layout. The method includes creating one or more tight clusters; computing a set of process parameters associated with a point on said mask; comparing said set of process parameters to said one or more tight clusters; and reporting an error when at least one of said process parameters is away from said one or more tight clusters.
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