发明授权
- 专利标题: Conductive spacers extended floating gates
- 专利标题(中): 导电间隔物延伸浮动门
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申请号: US12173440申请日: 2008-07-15
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公开(公告)号: US08063429B2公开(公告)日: 2011-11-22
- 发明人: Antonius Maria Petrus Johannes Hendriks , Josephus Franciscus Antonius Maria Guelen , Guido Jozef Maria Dormans
- 申请人: Antonius Maria Petrus Johannes Hendriks , Josephus Franciscus Antonius Maria Guelen , Guido Jozef Maria Dormans
- 申请人地址: NL Eindhoven
- 专利权人: NXP B.V.
- 当前专利权人: NXP B.V.
- 当前专利权人地址: NL Eindhoven
- 优先权: EP02077452 20020620
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A method for manufacturing on a substrate a semiconductor device with improved floating-gate to control-gate coupling ratio is described. The method comprises the steps of first forming an isolation zone in the substrate, thereafter forming the floating gate on the substrate, thereafter extending the floating gate using polysilicon spacers, and thereafter forming the control gate over the floating gate and the polysilicon spacers. Such a semiconductor device may be used in flash memory cells or EEPROMs.
公开/授权文献
- US20080283899A1 CONDUCTIVE SPACERS EXTENDED FLOATING GATES 公开/授权日:2008-11-20
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