Invention Grant
- Patent Title: Floating sheet measurement apparatus and method
- Patent Title (中): 浮动片测量装置及方法
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Application No.: US12403200Application Date: 2009-03-12
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Publication No.: US08064071B2Publication Date: 2011-11-22
- Inventor: Christopher A. Rowland , Peter L. Kellerman , Frank Sinclair , Julian G. Blake , Nicholas P. T. Bateman
- Applicant: Christopher A. Rowland , Peter L. Kellerman , Frank Sinclair , Julian G. Blake , Nicholas P. T. Bateman
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: G01B11/14
- IPC: G01B11/14
Abstract:
A sheet measurement apparatus has a sheet disposed in a melt. The measurement system uses a beam to determine a dimension of the sheet. This dimension may be, for example, height or width. The beam may be, for example, collimated light, a laser, x-rays, or gamma rays. The production of the sheet may be altered based on the measurements.
Public/Granted literature
- US20090231597A1 FLOATING SHEET MEASUREMENT APPARATUS AND METHOD Public/Granted day:2009-09-17
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