Invention Grant
- Patent Title: Image sensor and manufacturing method thereof
- Patent Title (中): 图像传感器及其制造方法
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Application No.: US12508846Application Date: 2009-07-24
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Publication No.: US08067740B2Publication Date: 2011-11-29
- Inventor: Keita Sasaki , Hideyuki Funaki , Hiroto Honda , Ikuo Fujiwara , Koichi Ishii , Hitoshi Yagi
- Applicant: Keita Sasaki , Hideyuki Funaki , Hiroto Honda , Ikuo Fujiwara , Koichi Ishii , Hitoshi Yagi
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2008-196027 20080730
- Main IPC: H01L31/02
- IPC: H01L31/02

Abstract:
An image sensor includes a semiconductor substrate; first pixels laid out above cavities provided within the semiconductor substrate, the first pixels converting thermal energy generated by incident light into an electric signal; supporting parts connected between the first pixels and the semiconductor substrate, the supporting parts supporting the first pixels above the cavities; and second pixels fixedly provided on the semiconductor substrate without via the cavities, wherein a plurality of the first pixels and a plurality of the second pixels are laid out two-dimensionally to form a pixel region, and each of the second pixels is adjacent to the first pixels.
Public/Granted literature
- US20100025584A1 IMAGE SENSOR AND MANUFACTURING METHOD THEREOF Public/Granted day:2010-02-04
Information query
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