发明授权
- 专利标题: Semiconductor testing method and semiconductor tester
- 专利标题(中): 半导体测试方法和半导体测试仪
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申请号: US12764992申请日: 2010-04-22
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公开(公告)号: US08067752B2公开(公告)日: 2011-11-29
- 发明人: Tohru Ando , Yasuhiko Nara , Tsutomu Saito , Shinichi Kato , Takeshi Sunaoshi
- 申请人: Tohru Ando , Yasuhiko Nara , Tsutomu Saito , Shinichi Kato , Takeshi Sunaoshi
- 申请人地址: JP Tokyo
- 专利权人: Hitachi High-Technologies Corporation
- 当前专利权人: Hitachi High-Technologies Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Crowell & Moring LLP
- 优先权: JP2006-238757 20060904
- 主分类号: H01J49/00
- IPC分类号: H01J49/00 ; G06K9/00 ; G06K9/62
摘要:
A semiconductor testing method capable of quickly counting semiconductor cells in which a seemingly horizontal or vertical line is drawn with a mouse, and raster rotation is performed in alignment with the closer axis. After that, the stage is horizontally moved, pattern matching is performed on an image on a position where the image should be disposed, and an angle is adjusted. The stage is moved evenly along the X-axis and the Y-axis, achieving a movement to a destination like a straight line. In synchronization with the smooth movement of the stage, a cell is surrounded in a rectangular frame by a ruler, and the number of cells is displayed with a numeric value.
公开/授权文献
- US20100200749A1 Semiconductor Testing Method and Semiconductor Tester 公开/授权日:2010-08-12
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