发明授权
US08069726B2 X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
有权
X-Y轴双质量音叉陀螺仪,具有垂直集成电子和晶片级密封包装
- 专利标题: X-Y axis dual-mass tuning fork gyroscope with vertically integrated electronics and wafer-scale hermetic packaging
- 专利标题(中): X-Y轴双质量音叉陀螺仪,具有垂直集成电子和晶片级密封包装
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申请号: US12621463申请日: 2009-11-18
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公开(公告)号: US08069726B2公开(公告)日: 2011-12-06
- 发明人: Joseph Seeger , Steven S. Nasiri , Alexander Castro
- 申请人: Joseph Seeger , Steven S. Nasiri , Alexander Castro
- 申请人地址: US CA Sunnyvale
- 专利权人: Invensense, Inc.
- 当前专利权人: Invensense, Inc.
- 当前专利权人地址: US CA Sunnyvale
- 代理机构: Sawyer Law Group, P.C.
- 主分类号: G01P9/04
- IPC分类号: G01P9/04 ; G01C19/00
摘要:
An angular velocity sensor has two masses which are laterally disposed in an X-Y plane and indirectly connected to a frame. The two masses are linked together by a linkage such that they necessarily move in opposite directions along Z. Angular velocity of the sensor about the Y axis can be sensed by driving the two masses into Z-directed antiphase oscillation and measuring the angular oscillation amplitude thereby imparted to the frame. In a preferred embodiment, the angular velocity sensor is fabricated from a bulk MEMS gyroscope wafer, a cap wafer and a reference wafer. In a further preferred embodiment, this assembly of wafers provides a hermetic barrier between the masses and an ambient environment.
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