Invention Grant
US08070970B2 UV-LIGA process for fabricating a multilayer metal structure having adjacent layers that are not entirely superposed, and the structure obtained 有权
用于制造具有不完全重叠的相邻层的多层金属结构的UV-LIGA工艺以及所获得的结构

  • Patent Title: UV-LIGA process for fabricating a multilayer metal structure having adjacent layers that are not entirely superposed, and the structure obtained
  • Patent Title (中): 用于制造具有不完全重叠的相邻层的多层金属结构的UV-LIGA工艺以及所获得的结构
  • Application No.: US12282751
    Application Date: 2007-03-08
  • Publication No.: US08070970B2
    Publication Date: 2011-12-06
  • Inventor: Clement Saucy
  • Applicant: Clement Saucy
  • Applicant Address: CH Bienne
  • Assignee: Doniar SA
  • Current Assignee: Doniar SA
  • Current Assignee Address: CH Bienne
  • Agency: Westerman, Hattori, Daniels & Adrian, LLP
  • Priority: EP06405115 20060315
  • International Application: PCT/CH2007/000126 WO 20070308
  • International Announcement: WO2007/104171 WO 20070920
  • Main IPC: B44C1/22
  • IPC: B44C1/22
UV-LIGA process for fabricating a multilayer metal structure having adjacent layers that are not entirely superposed, and the structure obtained
Abstract:
A layer of photoresist is spread on a metal substrate and heated, this layer is exposed through a mask to UV irradiation, the parts not photocured are developed, by dissolving them, so as to obtain a mold, a first layer of metal or of an alloy is galvanically deposited in the open parts of the mold, the metal structure and the mold are leveled by machining so as to obtain a plane upper surface, a metal ply layer is deposited on the entire upper surface, and then the above steps are repeated. A second layer of metal or an alloy is galvanically deposited in the open parts of the mold, the multilayer metal structure obtained is detached from the substrate by delamination and the photoresist is cured, the photoresist is separated so as to free the multilayer metal structure, and then that portion of the metal ply layer or layers which is not inserted between two electrodeposited metal layers is removed.
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