发明授权
- 专利标题: Magnetic deflector for an electron column
- 专利标题(中): 用于电子柱的磁偏转器
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申请号: US12600266申请日: 2008-05-15
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公开(公告)号: US08071955B2公开(公告)日: 2011-12-06
- 发明人: Ho Seob Kim , Young Chul Kim
- 申请人: Ho Seob Kim , Young Chul Kim
- 申请人地址: KR
- 专利权人: Cebt Co. Ltd.
- 当前专利权人: Cebt Co. Ltd.
- 当前专利权人地址: KR
- 代理机构: Park Law Firm
- 代理商 John K. Park
- 优先权: KR10-2007-0047350 20070515
- 国际申请: PCT/KR2008/002713 WO 20080515
- 国际公布: WO2008/140273 WO 20081120
- 主分类号: H01J3/26
- IPC分类号: H01J3/26 ; H01J37/14 ; H01J37/147
摘要:
The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or functioning as a stigmator using a magnetic field. The deflector (100) according to the present invention includes one or more deflector electrodes. Each of the deflector electrodes includes a core (12) made of a conductor or a semiconductor, and a coil (11) wound around the core (12).
公开/授权文献
- US20100148086A1 MAGNETIC DEFLECTOR FOR AN ELECTRON COLUMN 公开/授权日:2010-06-17