发明授权
US08071955B2 Magnetic deflector for an electron column 有权
用于电子柱的磁偏转器

  • 专利标题: Magnetic deflector for an electron column
  • 专利标题(中): 用于电子柱的磁偏转器
  • 申请号: US12600266
    申请日: 2008-05-15
  • 公开(公告)号: US08071955B2
    公开(公告)日: 2011-12-06
  • 发明人: Ho Seob KimYoung Chul Kim
  • 申请人: Ho Seob KimYoung Chul Kim
  • 申请人地址: KR
  • 专利权人: Cebt Co. Ltd.
  • 当前专利权人: Cebt Co. Ltd.
  • 当前专利权人地址: KR
  • 代理机构: Park Law Firm
  • 代理商 John K. Park
  • 优先权: KR10-2007-0047350 20070515
  • 国际申请: PCT/KR2008/002713 WO 20080515
  • 国际公布: WO2008/140273 WO 20081120
  • 主分类号: H01J3/26
  • IPC分类号: H01J3/26 H01J37/14 H01J37/147
Magnetic deflector for an electron column
摘要:
The present invention relates, in general, to a deflector for microcolumns for generating electron beams, and, more particularly, to a deflector capable of scanning or shifting electron beams or functioning as a stigmator using a magnetic field. The deflector (100) according to the present invention includes one or more deflector electrodes. Each of the deflector electrodes includes a core (12) made of a conductor or a semiconductor, and a coil (11) wound around the core (12).
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