发明授权
- 专利标题: Polishing slurry and polishing method
- 专利标题(中): 抛光浆和抛光方法
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申请号: US10558406申请日: 2004-05-28
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公开(公告)号: US08075800B2公开(公告)日: 2011-12-13
- 发明人: Naoyuki Koyama , Youichi Machii , Masato Yoshida , Masato Fukasawa , Toranosuke Ashizawa
- 申请人: Naoyuki Koyama , Youichi Machii , Masato Yoshida , Masato Fukasawa , Toranosuke Ashizawa
- 申请人地址: JP Tokyo
- 专利权人: Hitachi Chemical Co., Ltd.
- 当前专利权人: Hitachi Chemical Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Westerman, Hattori, Daniels & Adrian, LLP
- 优先权: JPP2003-150319 20030528
- 国际申请: PCT/JP2004/007746 WO 20040528
- 国际公布: WO2004/107429 WO 20041209
- 主分类号: C09K13/00
- IPC分类号: C09K13/00 ; H01L21/461 ; H01L21/302
摘要:
A polishing slurry containing a slurry dispersing particles of tetravalent metal hydroxide in a medium therein and an additive, characterized in that the additive is a polymer containing at least one kind of monomer component selected from a group of monomers represented with a general formulae (I) and (II) below (In the general formulae (I) and (II), R1 denotes hydrogen, a methyl group, a phenyl group, a benzil group, a chlorine group, a difluoromethyl group, a trifluoromethyl group or a cyano group, R2 and R3 denote hydrogen or an alkyl chain having 1 to 18 carbon atoms, a methylol group, an acetyl group or a diacetonyl group, and a case where both are hydrogen is not included. R4 denotes a morpholino group, a thiomorpholino group, a pyrrolidinyl group or a piperidino group.) The invention provides a polishing slurry in which particles form a chemical reaction layer with a polishing film to be removed with a very small mechanical action of the particles and mechanical removal by a pad without scratches and the additive realizes high planarity.
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