Invention Grant
US08075947B2 Optical thin-film-forming methods and optical elements formed using same
失效
光学薄膜形成方法和使用其形成的光学元件
- Patent Title: Optical thin-film-forming methods and optical elements formed using same
- Patent Title (中): 光学薄膜形成方法和使用其形成的光学元件
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Application No.: US12133287Application Date: 2008-06-04
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Publication No.: US08075947B2Publication Date: 2011-12-13
- Inventor: Shinya Kikegawa , Toshimasa Nishi , Motoo Takada
- Applicant: Shinya Kikegawa , Toshimasa Nishi , Motoo Takada
- Applicant Address: JP Tokyo
- Assignee: Nihon Dempa Kogyo Co., Ltd.
- Current Assignee: Nihon Dempa Kogyo Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Klarquist Sparkman, LLP
- Priority: JP2007-148760 20070605
- Main IPC: B05D5/06
- IPC: B05D5/06

Abstract:
Optical thin-film-forming methods are disclosed that form optical thin film on a base plate arranged in a vacuum chamber. An exemplary method includes the steps of retaining the base plates on a plurality of retaining frames of a base-plate retainer, heating the base plate, and emitting a deposition material from a deposition source. The retaining frames are configured to make the entire base plate uniformly heated.
Public/Granted literature
- US20080305314A1 OPTICAL THIN-FILM-FORMING METHODS AND APPARATUS, AND OPTICAL ELEMENTS FORMED USING SAME Public/Granted day:2008-12-11
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