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US08075947B2 Optical thin-film-forming methods and optical elements formed using same 失效
光学薄膜形成方法和使用其形成的光学元件

Optical thin-film-forming methods and optical elements formed using same
Abstract:
Optical thin-film-forming methods are disclosed that form optical thin film on a base plate arranged in a vacuum chamber. An exemplary method includes the steps of retaining the base plates on a plurality of retaining frames of a base-plate retainer, heating the base plate, and emitting a deposition material from a deposition source. The retaining frames are configured to make the entire base plate uniformly heated.
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