Invention Grant
- Patent Title: Fringe capacitor using bootstrapped non-metal layer
- Patent Title (中): 边缘电容器采用自举非金属层
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Application No.: US11384961Application Date: 2006-03-20
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Publication No.: US08076752B2Publication Date: 2011-12-13
- Inventor: Scott C. McLeod
- Applicant: Scott C. McLeod
- Applicant Address: US NY Hauppauge
- Assignee: Standard Microsystems Corporation
- Current Assignee: Standard Microsystems Corporation
- Current Assignee Address: US NY Hauppauge
- Agency: Meyertons Hood Kivlin Kowert & Goetzel, P.C.
- Agent Jeffrey C. Hood
- Main IPC: H01L29/00
- IPC: H01L29/00

Abstract:
Capacitors configured in a switched-capacitor circuit on a semiconductor device may comprise very accurately matched, high capacitance density metal-to-metal capacitors, using top-plate-to-bottom-plate fringe-capacitance for obtaining the desired capacitance values. A polysilicon plate may be inserted below the bottom metal layer as a shield, and bootstrapped to the top plate of each capacitor in order to minimize and/or eliminate the parasitic top-plate-to-substrate capacitance. This may free up the bottom metal layer to be used in forming additional fringe-capacitance, thereby increasing capacitance density. By forming each capacitance solely based on fringe-capacitance from the top plate to the bottom plate, no parallel-plate-capacitance is used, which may reduce capacitor mismatch. Parasitic bottom plate capacitance to the substrate may also be eliminated, with only a small capacitance to the bootstrapped polysilicon plate remaining. The capacitors may be bootstrapped by coupling the top plate of each capacitor to a respective one of the differential inputs of an amplifier comprised in the switched-capacitor circuit.
Public/Granted literature
- US20070215928A1 Fringe capacitor using bootstrapped non-metal layer Public/Granted day:2007-09-20
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