发明授权
- 专利标题: Methods, systems and computer program products for characterizing structures based on interferometric phase data
- 专利标题(中): 基于干涉相位数据表征结构的方法,系统和计算机程序产品
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申请号: US12634153申请日: 2009-12-09
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公开(公告)号: US08077325B2公开(公告)日: 2011-12-13
- 发明人: Michael Choma , Joseph A. Izatt , Audrey Ellerbee , Marinko Sarunic
- 申请人: Michael Choma , Joseph A. Izatt , Audrey Ellerbee , Marinko Sarunic
- 申请人地址: US NC Durham
- 专利权人: Duke University
- 当前专利权人: Duke University
- 当前专利权人地址: US NC Durham
- 代理机构: Myers Bigel Sibley & Sajovec
- 主分类号: G01N21/41
- IPC分类号: G01N21/41
摘要:
Structure profiles from optical interferometric data can be identified by obtaining a plurality of broadband interferometric optical profiles of a structure as a function of structure depth in an axial direction. Each of the plurality of interferometric optical profiles include a reference signal propagated through a reference path and a sample signal reflected from a sample reflector in the axial direction. An axial position corresponding to at least a portion of the structure is selected. Phase variations of the plurality of interferometric optical profiles are determined at the selected axial position. A physical displacement of the structure is identified based on the phase variations at the selected axial position.
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