发明授权
US08077325B2 Methods, systems and computer program products for characterizing structures based on interferometric phase data 有权
基于干涉相位数据表征结构的方法,系统和计算机程序产品

Methods, systems and computer program products for characterizing structures based on interferometric phase data
摘要:
Structure profiles from optical interferometric data can be identified by obtaining a plurality of broadband interferometric optical profiles of a structure as a function of structure depth in an axial direction. Each of the plurality of interferometric optical profiles include a reference signal propagated through a reference path and a sample signal reflected from a sample reflector in the axial direction. An axial position corresponding to at least a portion of the structure is selected. Phase variations of the plurality of interferometric optical profiles are determined at the selected axial position. A physical displacement of the structure is identified based on the phase variations at the selected axial position.
信息查询
0/0