发明授权
US08081315B2 Displacement measuring instrument and displacement measuring method 有权
位移测量仪和位移测量方法

  • 专利标题: Displacement measuring instrument and displacement measuring method
  • 专利标题(中): 位移测量仪和位移测量方法
  • 申请号: US12458828
    申请日: 2009-07-23
  • 公开(公告)号: US08081315B2
    公开(公告)日: 2011-12-20
  • 发明人: Kaoru Miyata
  • 申请人: Kaoru Miyata
  • 申请人地址: JP Kawasaki-Shi
  • 专利权人: Mitutoyo Corporation
  • 当前专利权人: Mitutoyo Corporation
  • 当前专利权人地址: JP Kawasaki-Shi
  • 代理机构: Oliff & Berridge, PLC
  • 优先权: JP2008-200023 20080801
  • 主分类号: G01B9/02
  • IPC分类号: G01B9/02
Displacement measuring instrument and displacement measuring method
摘要:
A laser interferometric measuring instrument includes: a light source that emits a laser beam of 1064 nm and another laser beam of 532 nm; a polarizing beam splitter; a dichroic mirror that splits a long-wavelength laser beam provided in a measurement optical path; a long-wavelength corner cube that reflects the split laser beam; a measurement corner cube that is displaceable along the measurement optical path; a reference corner cube that is displaceable along a reference optical path; a optical path changing unit that changes an optical path length of the long-wavelength laser beam; a phase detector that outputs interference signals; a sum signal computer that calculates a sum signal; a displacement controller that displaces the reference corner cube so as not to change a phase of the sum signal; a reference displacement detector that detects a displacement of the reference corner cube; and a measurement displacement computer that calculates a displacement of the measurement corner cube.
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