发明授权
- 专利标题: Displacement measuring instrument and displacement measuring method
- 专利标题(中): 位移测量仪和位移测量方法
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申请号: US12458828申请日: 2009-07-23
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公开(公告)号: US08081315B2公开(公告)日: 2011-12-20
- 发明人: Kaoru Miyata
- 申请人: Kaoru Miyata
- 申请人地址: JP Kawasaki-Shi
- 专利权人: Mitutoyo Corporation
- 当前专利权人: Mitutoyo Corporation
- 当前专利权人地址: JP Kawasaki-Shi
- 代理机构: Oliff & Berridge, PLC
- 优先权: JP2008-200023 20080801
- 主分类号: G01B9/02
- IPC分类号: G01B9/02
摘要:
A laser interferometric measuring instrument includes: a light source that emits a laser beam of 1064 nm and another laser beam of 532 nm; a polarizing beam splitter; a dichroic mirror that splits a long-wavelength laser beam provided in a measurement optical path; a long-wavelength corner cube that reflects the split laser beam; a measurement corner cube that is displaceable along the measurement optical path; a reference corner cube that is displaceable along a reference optical path; a optical path changing unit that changes an optical path length of the long-wavelength laser beam; a phase detector that outputs interference signals; a sum signal computer that calculates a sum signal; a displacement controller that displaces the reference corner cube so as not to change a phase of the sum signal; a reference displacement detector that detects a displacement of the reference corner cube; and a measurement displacement computer that calculates a displacement of the measurement corner cube.
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