Invention Grant
- Patent Title: Substrate supporting apparatus
- Patent Title (中): 基板支撑装置
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Application No.: US12188453Application Date: 2008-08-08
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Publication No.: US08087652B2Publication Date: 2012-01-03
- Inventor: Suk Min Son
- Applicant: Suk Min Son
- Applicant Address: KR Seongnam-Si
- Assignee: Advanced Display Process Engineering Co., Ltd
- Current Assignee: Advanced Display Process Engineering Co., Ltd
- Current Assignee Address: KR Seongnam-Si
- Agency: Ked & Associates LLP
- Priority: KR10-2007-0079562 20070808
- Main IPC: B23P19/00
- IPC: B23P19/00

Abstract:
A substrate supporting apparatus includes first and second shafts spaced by a distance that corresponds to or exceeds a width of a substrate, and at least one wire to support the substrate. The wire has ends coupled to respective ones of the first and second shafts. The wire is raised and lowered to place a substrate onto a lower electrode in a substrate processing chamber and to remove the substrate when processing is completed.
Public/Granted literature
- US20090042324A1 SUBSTRATE SUPPORTING APPARATUS Public/Granted day:2009-02-12
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