发明授权
US08087910B2 Chemical liquid supplying apparatus 失效
化学液体供给装置

  • 专利标题: Chemical liquid supplying apparatus
  • 专利标题(中): 化学液体供给装置
  • 申请号: US11909083
    申请日: 2006-04-06
  • 公开(公告)号: US08087910B2
    公开(公告)日: 2012-01-03
  • 发明人: Takeo Yajima
  • 申请人: Takeo Yajima
  • 申请人地址: JP Tokyo
  • 专利权人: Koganei Corporation
  • 当前专利权人: Koganei Corporation
  • 当前专利权人地址: JP Tokyo
  • 代理机构: McCormick, Paulding & Huber LLP
  • 优先权: JP2005-115634 20050413
  • 国际申请: PCT/JP2006/307360 WO 20060406
  • 国际公布: WO2006/112271 WO 20061026
  • 主分类号: F04B43/08
  • IPC分类号: F04B43/08
Chemical liquid supplying apparatus
摘要:
A chemical liquid supplying apparatus 10 has a bellows 11, which includes a small-size bellows portion 13, a large-size bellows portion 14 with a larger volume change per axial-directional unit displacement amount than that of the small-size bellows portion 13, and a drive portion 12 therebetween. An apparatus main body 10a to which the bellows 11 is attached includes a supporting member 21 to which a fixed end portion 15 of the bellows 11 is attached and a supporting member 22 to which a fixed end portion 16 of the bellows 11 is attached. A drive sleeve 27 surrounds the bellows 11 and is rotatably supported on the apparatus main body 10a. A driven cylinder body 32 attached to the drive portion 12 converts rotation of the drive sleeve 27 to axial-directional movement of the drive portion 12.
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