发明授权
- 专利标题: Chemical liquid supplying apparatus
- 专利标题(中): 化学液体供给装置
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申请号: US11909083申请日: 2006-04-06
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公开(公告)号: US08087910B2公开(公告)日: 2012-01-03
- 发明人: Takeo Yajima
- 申请人: Takeo Yajima
- 申请人地址: JP Tokyo
- 专利权人: Koganei Corporation
- 当前专利权人: Koganei Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: McCormick, Paulding & Huber LLP
- 优先权: JP2005-115634 20050413
- 国际申请: PCT/JP2006/307360 WO 20060406
- 国际公布: WO2006/112271 WO 20061026
- 主分类号: F04B43/08
- IPC分类号: F04B43/08
摘要:
A chemical liquid supplying apparatus 10 has a bellows 11, which includes a small-size bellows portion 13, a large-size bellows portion 14 with a larger volume change per axial-directional unit displacement amount than that of the small-size bellows portion 13, and a drive portion 12 therebetween. An apparatus main body 10a to which the bellows 11 is attached includes a supporting member 21 to which a fixed end portion 15 of the bellows 11 is attached and a supporting member 22 to which a fixed end portion 16 of the bellows 11 is attached. A drive sleeve 27 surrounds the bellows 11 and is rotatably supported on the apparatus main body 10a. A driven cylinder body 32 attached to the drive portion 12 converts rotation of the drive sleeve 27 to axial-directional movement of the drive portion 12.
公开/授权文献
- US20090123312A1 CHEMICAL LIQUID SUPPLYING APPARATUS 公开/授权日:2009-05-14
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