发明授权
- 专利标题: Stage with displacement magnification mechanism for measuring
- 专利标题(中): 用于测量的位移放大机构的阶段
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申请号: US12373460申请日: 2006-12-22
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公开(公告)号: US08089638B2公开(公告)日: 2012-01-03
- 发明人: Deug Woo Lee , Soo Chang Choi , Jung Woo Park
- 申请人: Deug Woo Lee , Soo Chang Choi , Jung Woo Park
- 代理机构: Lowe Hauptman Ham & Berner LLP
- 优先权: KR10-2006-0065664 20060713; KR10-2006-0126116 20061212
- 国际申请: PCT/KR2006/005675 WO 20061222
- 国际公布: WO2008/007838 WO 20080117
- 主分类号: G01B11/14
- IPC分类号: G01B11/14
摘要:
The present invention relates to a stage with a displacement measuring means capable of measuring a displacement, and more particularly, to a stage provided with a displacement magnification means capable of magnifying a displacement so as to precisely measure a minute displacement on the order of nanometers. A stage according to an aspect of the present invention comprises a fixed base, a movable table, a first elastic support, a first actuator, a first displacement converting means and a first displacement measuring means. The movable table is installed to be movable with respect to the fixed base. The first elastic support supports the movable table with respect to the fixed base, and the first actuator generates a displacement of the movable table in one direction. The first displacement converting means is connected to the movable table and the fixed base so as to convert the unidirectional displacement of the movable table into a rotational displacement about a point thereof connected to the movable table. The first displacement measuring means measures the displacement converted by the first displacement converting means. The present invention provides a stage provided with a device capable of magnifying and measuring a displacement generated in a feeding table, thereby implementing a high measurement precision using a measurement device with a low precision.
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