发明授权
- 专利标题: Acoustic sensor element
- 专利标题(中): 声学传感器元件
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申请号: US12598994申请日: 2008-06-10
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公开(公告)号: US08089828B2公开(公告)日: 2012-01-03
- 发明人: Frank Fischer , Arnim Hoechst
- 申请人: Frank Fischer , Arnim Hoechst
- 申请人地址: DE Stuttgart
- 专利权人: Robert Bosch GmbH
- 当前专利权人: Robert Bosch GmbH
- 当前专利权人地址: DE Stuttgart
- 代理机构: Kenyon & Kenyon LLP
- 优先权: DE102007029911 20070628
- 国际申请: PCT/EP2008/057211 WO 20080610
- 国际公布: WO2009/000641 WO 20081231
- 主分类号: H04R19/04
- IPC分类号: H04R19/04
摘要:
A micromechanical acoustic sensor element, which has at least one diaphragm and at least one fixed counter element, the diaphragm being situated in a cavity between a substrate and the counter element and acting as movable electrode of a capacitor system, the counter element acting as first fixed counter electrode of this capacitor system, and at least one through hole being formed in the substrate for the application of sound pressure to the diaphragm. For fixation and strengthening purposes, the counter element is connected to the substrate via at least one support element. The support element is situated in the region of the cavity, and an opening is formed in the diaphragm for the support element.
公开/授权文献
- US20100135123A1 ACOUSTIC SENSOR ELEMENT 公开/授权日:2010-06-03