Invention Grant
- Patent Title: Method for predicting cycle time
- Patent Title (中): 预测周期时间的方法
-
Application No.: US12243301Application Date: 2008-10-01
-
Publication No.: US08090668B2Publication Date: 2012-01-03
- Inventor: Yi Feng Lee , Chun Chi Chen , Yun-Zong Tian , Tsung-Wei Lin
- Applicant: Yi Feng Lee , Chun Chi Chen , Yun-Zong Tian , Tsung-Wei Lin
- Applicant Address: TW Taoyuan County
- Assignee: Inotera Memories, Inc.
- Current Assignee: Inotera Memories, Inc.
- Current Assignee Address: TW Taoyuan County
- Agency: Rosenberg, Klein & Lee
- Priority: TW97123720A 20080625
- Main IPC: G06F15/18
- IPC: G06F15/18 ; G06E1/00

Abstract:
A method for predicting cycle time comprises the steps of: collecting a plurality of known sets of data; using a clustering method to classify the known sets of data into a plurality of clusters; using a decision tree method to build a classification rule of the clusters; building a prediction model of each cluster; preparing data predicted set of data; using the classification rule to determine that to which clusters the predicted set of data belongs; and using the prediction model of the cluster to estimate the objective cycle time of the predicted set of data. Therefore, engineers can beforehand know the cycle time that one lot of wafers spend in the forward fabrication process, which helps engineers to properly arrange the following fabrication process of the lot of wafer.
Public/Granted literature
- US20090327173A1 METHOD FOR PREDICTING CYCLE TIME Public/Granted day:2009-12-31
Information query