Invention Grant
US08094839B2 Microelectromechanical system (MEMS) device with senstivity trimming circuit and trimming process
有权
微机电系统（MEMS）器件具有灵敏度调整电路和修整过程
- Patent Title: Microelectromechanical system (MEMS) device with senstivity trimming circuit and trimming process
- Patent Title (中): 微机电系统（MEMS）器件具有灵敏度调整电路和修整过程
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Application No.: US12432758Application Date: 2009-04-30
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Publication No.: US08094839B2Publication Date: 2012-01-10
- Inventor: Chien-Hsing Lee , Tsung-Min Hsieh , Shao-Yi Wu
- Applicant: Chien-Hsing Lee , Tsung-Min Hsieh , Shao-Yi Wu
- Applicant Address: TW Hsinchu
- Assignee: Solid State System Co., Ltd.
- Current Assignee: Solid State System Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Jianq Chyun IP Office
- Main IPC: H03F99/00
- IPC: H03F99/00 ; H04R1/00 ; H02B1/00 ; H03G3/00
Abstract:
A microelectromechanical system (MEMS) device includes a diaphragm capacitor, connected between a capacitor biasing voltage source and a ground. A source follower circuit is coupled to the diaphragm capacitor. An amplifier is coupled to the source follower circuit to amplify the voltage signal as an output voltage signal. A programmable trimming circuit is implemented with the amplifier to trim a gain or implemented with the capacitor biasing voltage source to trim voltage applied on the diaphragm capacitor. Whereby, the output voltage signal has a target sensitivity.
Public/Granted literature
- US20100277229A1 MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICE WITH SENSTIVITY TRIMMING CIRCUIT AND TRIMMING PROCESS Public/Granted day:2010-11-04
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