发明授权
- 专利标题: Electrically erasable and programmable read only memory device comprising common source region and method of manufacturing same
- 专利标题(中): 电可擦除和可编程只读存储器件,其包括公共源极区域及其制造方法
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申请号: US11891605申请日: 2007-08-10
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公开(公告)号: US08097913B2公开(公告)日: 2012-01-17
- 发明人: Weon-Ho Park , Jeong-Uk Han , Yong-Tae Kim
- 申请人: Weon-Ho Park , Jeong-Uk Han , Yong-Tae Kim
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Onello & Mello, LLP
- 优先权: KR10-2006-0085025 20060905
- 主分类号: H01L27/115
- IPC分类号: H01L27/115 ; H01L21/8247
摘要:
An electrically erasable and programmable read only memory (EEPROM) device and a method of manufacturing the EEPROM device are provided. First and second gate structures having the same structure are formed on a tunnel insulating layer formed on a substrate, such that the first and second gate structures are spaced apart from each other. A common source region is formed at a portion of the substrate located between the first and second gate structures. First and second drain regions are formed at first and second portions of the substrate adjacent to the first and second gate structures, respectively. Thus, the EEPROM device is manufactured including first and second transistors that have the same structure and may alternately serve as a memory transistor and a selection transistor according to an applied signal.
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