发明授权
US08097931B2 Fuse part in semiconductor device and method for forming the same
有权
半导体装置中的保险丝部件及其形成方法
- 专利标题: Fuse part in semiconductor device and method for forming the same
- 专利标题(中): 半导体装置中的保险丝部件及其形成方法
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申请号: US12344174申请日: 2008-12-24
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公开(公告)号: US08097931B2公开(公告)日: 2012-01-17
- 发明人: Byung-Duk Lee
- 申请人: Byung-Duk Lee
- 申请人地址: KR Icheon-si, Gyeonggi-do
- 专利权人: Hynix Semiconductor Inc.
- 当前专利权人: Hynix Semiconductor Inc.
- 当前专利权人地址: KR Icheon-si, Gyeonggi-do
- 代理机构: Lowe Hauptman Ham & Berner LLP
- 优先权: KR10-2008-0030268 20080401
- 主分类号: H01L23/52
- IPC分类号: H01L23/52
摘要:
A fuse part in a semiconductor device has a plurality of fuse lines extended along a first direction with a given width along a second direction. The fuse part includes a first conductive pattern having a space part formed in a fuse line region over a substrate, wherein portions of the first conductive pattern are spaced apart by the space part along the first direction. The fuse part includes a first insulation pattern formed over the space part, the first insulation pattern having a width smaller than a width of the first conductive pattern along the second direction and a thickness greater than a thickness of the first conductive pattern, and a second conductive pattern formed over the first insulation pattern, the second conductive pattern having a width greater than the width of the first insulation pattern along the second direction.
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