发明授权
US08100514B2 Inkjet head actuator and manufacturing method of the same 有权
喷墨头致动器及其制造方法相同

Inkjet head actuator and manufacturing method of the same
摘要:
There are provided an inkjet head actuator and a manufacturing method of the same. The inkjet head actuator includes: a vibration plate having a recess formed in a top surface thereof; a first electrode formed to cover a bottom surface and a side wall of the recess; a piezoelectric body formed on the first electrode to fill the recess; and a second electrode formed on the piezoelectric body. The inkjet head actuator having the thin film piezoelectric body and the vibration plate ensures large vibration displacement.
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