Invention Grant
- Patent Title: Inkjet head actuator and manufacturing method of the same
- Patent Title (中): 喷墨头致动器及其制造方法相同
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Application No.: US12314620Application Date: 2008-12-12
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Publication No.: US08100514B2Publication Date: 2012-01-24
- Inventor: Sang Jin Kim , Jae Woo Joung
- Applicant: Sang Jin Kim , Jae Woo Joung
- Applicant Address: KR Suwon
- Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee: Samsung Electro-Mechanics Co., Ltd.
- Current Assignee Address: KR Suwon
- Priority: KR10-2008-0073614 20080728
- Main IPC: B41J2/045
- IPC: B41J2/045

Abstract:
There are provided an inkjet head actuator and a manufacturing method of the same. The inkjet head actuator includes: a vibration plate having a recess formed in a top surface thereof; a first electrode formed to cover a bottom surface and a side wall of the recess; a piezoelectric body formed on the first electrode to fill the recess; and a second electrode formed on the piezoelectric body. The inkjet head actuator having the thin film piezoelectric body and the vibration plate ensures large vibration displacement.
Public/Granted literature
- US20100020132A1 Inkjet head actuator and manufacturing method of the same Public/Granted day:2010-01-28
Information query
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