发明授权
- 专利标题: Exposure apparatus and method of manufacturing device
- 专利标题(中): 曝光装置及其制造方法
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申请号: US12251780申请日: 2008-10-15
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公开(公告)号: US08102503B2公开(公告)日: 2012-01-24
- 发明人: Toshiyuki Yoshihara , Yuji Shinano
- 申请人: Toshiyuki Yoshihara , Yuji Shinano
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Canon U.S.A., Inc., IP Division
- 优先权: JP2007-273092 20071019
- 主分类号: G03B27/32
- IPC分类号: G03B27/32 ; G03B27/42 ; G03B27/54 ; G03B27/68 ; G03B27/74
摘要:
The present invention provides an exposure apparatus comprising a projection optical system including an optical element of which at least one of a position, orientation, and shape can be regulated, a regulator configured to regulate the at least one of the position, orientation, and shape of the optical element, and a controller configured to calculate, using quadratic programming, a regulation amount of the optical element that minimizes a value of an objective function expressed by a first dummy variable serving as an upper limit of a linear optical characteristic value of the projection optical system, and a second dummy variable serving as an upper limit of a quadratic optical characteristic value of the projection optical system, and to control the regulator based on the calculated regulation amount.
公开/授权文献
- US20090103065A1 EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE 公开/授权日:2009-04-23
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