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US08105907B2 Manufacturing method of semiconductor memory device 有权
半导体存储器件的制造方法

Manufacturing method of semiconductor memory device
摘要:
To provide a manufacturing method of a semiconductor memory device, the method including forming contact plugs to be connected to a drain region or a source region of each of transistors, by using a SAC line technique of selectively etching an insulation layer that covers each of the transistors by using a mask having a line-shaped opening provided across the contact plugs. Each of the transistors constituting a sense amplifier that amplifies a potential difference between bit lines is a ring-gate transistor.
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