Invention Grant
- Patent Title: Ion beam control apparatus and method
- Patent Title (中): 离子束控制装置及方法
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Application No.: US12600540Application Date: 2008-05-20
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Publication No.: US08106366B2Publication Date: 2012-01-31
- Inventor: Akira Noda , Toshiyuki Shirai , Masahiro Ikegami , Shu Nakamura , Hiroyuki Daido , Kouji Noda
- Applicant: Akira Noda , Toshiyuki Shirai , Masahiro Ikegami , Shu Nakamura , Hiroyuki Daido , Kouji Noda
- Applicant Address: JP JP
- Assignee: Kyoto University,National Institute of Radiological Sciences
- Current Assignee: Kyoto University,National Institute of Radiological Sciences
- Current Assignee Address: JP JP
- Agent Gerald E. Hespos; Michael J. Porco
- Priority: JP2007-134132 20070521
- International Application: PCT/JP2008/059202 WO 20080520
- International Announcement: WO2008/143242 WO 20081127
- Main IPC: H01J27/02
- IPC: H01J27/02 ; H01J3/14 ; H01J3/08

Abstract:
Provided are an ion beam control apparatus and a control method for controlling an ion beam energy expansion level and an ion beam size in a radial direction. An ion beam control apparatus Sa is provided with an ion beam generating unit 2, and an ion beam control unit 1a in which a generated ion beam (IB) is input and controlled to be output with the prescribed level of energy expansion and the prescribed diameter in the radial direction. In the ion beam control unit 1a, phase rotation by a radio frequency electric field that increases existing probability with the prescribed level of energy is at least used.
Public/Granted literature
- US20100133445A1 ION BEAM CONTROL APPARATUS AND METHOD Public/Granted day:2010-06-03
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