发明授权
US08106565B2 Piezoceramic multilayer actuator with stress relief sections and insulation layers in sections without relief zones
有权
具有应力消除部分和绝缘层的压电陶瓷多层致动器，不带减压区段
- 专利标题： Piezoceramic multilayer actuator with stress relief sections and insulation layers in sections without relief zones
- 专利标题（中）： 具有应力消除部分和绝缘层的压电陶瓷多层致动器，不带减压区段
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申请号： US12520888申请日： 2007-12-19
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公开(公告)号： US08106565B2公开(公告)日： 2012-01-31
- 发明人: Harald Johannes Kastl , Christian Reichinger , Carsten Schuh
- 申请人： Harald Johannes Kastl , Christian Reichinger , Carsten Schuh
- 申请人地址： DE Munich
- 专利权人： Siemens Aktiengesellschaft
- 当前专利权人： Siemens Aktiengesellschaft
- 当前专利权人地址： DE Munich
- 代理机构： King & Spalding L.L.P.
- 优先权： DE102006062076 20061229
- 国际申请： PCT/EP2007/064250 WO 20071219
- 国际公布： WO2008/080859 WO 20080710
- 主分类号： H01L41/083
- IPC分类号： H01L41/083
摘要：
In a piezoelectric multilayer actuator (1) having micromechanical relief zones (30) and an insulation layer (40) as well as in a method for producing said actuator, as a result of the micromechanical relief zones (30), poling cracks are concentrated in these relief regions (30). This makes it possible to provide the sections I, II, III of the multilayer actuator (1) with an insulation layer (40) which only has an extension behavior similar to the multilayer actuator (1) without poling cracks.
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