发明授权
US08112752B2 Method for performing a software process, controller and lithographic apparatus
有权
用于执行软件处理,控制器和光刻设备的方法
- 专利标题: Method for performing a software process, controller and lithographic apparatus
- 专利标题(中): 用于执行软件处理,控制器和光刻设备的方法
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申请号: US11175035申请日: 2005-07-06
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公开(公告)号: US08112752B2公开(公告)日: 2012-02-07
- 发明人: Johannes Theodorus Guillielmus Maria Van De Ven , Robbert Jaap Van Der Kruk
- 申请人: Johannes Theodorus Guillielmus Maria Van De Ven , Robbert Jaap Van Der Kruk
- 申请人地址: NL Veldhoven
- 专利权人: ASML Netherlands B.V.
- 当前专利权人: ASML Netherlands B.V.
- 当前专利权人地址: NL Veldhoven
- 代理机构: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- 主分类号: G06F9/46
- IPC分类号: G06F9/46 ; G06F19/00
摘要:
A method for performing a software process, such as a real time software process, is disclosed, the process having a plurality of tasks, the method including starting a task of the plurality of tasks of the process, monitoring a progress of the started task, comparing the progress with a desired progress, if the progress does not meet the desired progress, skipping at least a part of a task of the plurality of tasks, and performing the process making use of an outcome of the tasks which have been completed. The monitoring of the progress may be performed upon completion of the task or at a predetermined moment in time.
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