发明授权
US08114775B2 Dihydroxy enol compounds used in chemical mechanical polishing compositions having metal ion oxidizers
有权
用于具有金属离子氧化剂的化学机械抛光组合物中的二羟基烯醇化合物
- 专利标题: Dihydroxy enol compounds used in chemical mechanical polishing compositions having metal ion oxidizers
- 专利标题(中): 用于具有金属离子氧化剂的化学机械抛光组合物中的二羟基烯醇化合物
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申请号: US12352700申请日: 2009-01-13
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公开(公告)号: US08114775B2公开(公告)日: 2012-02-14
- 发明人: Junaid Ahmed Siddiqui , Daniel Hernandez Castillo , Steven Masami Aragaki , Robin Edward Richards
- 申请人: Junaid Ahmed Siddiqui , Daniel Hernandez Castillo , Steven Masami Aragaki , Robin Edward Richards
- 申请人地址: US AZ Tempe
- 专利权人: DuPont Air Products Nanomaterials, LLC
- 当前专利权人: DuPont Air Products Nanomaterials, LLC
- 当前专利权人地址: US AZ Tempe
- 代理商 John R. Dodd; Geoffrey L. Chase
- 主分类号: H01L21/302
- IPC分类号: H01L21/302
摘要:
A chemical mechanical polishing composition contains 1) water, 2) optionally an abrasive material, 3) an oxidizer, preferably a per-type oxidizer, 4) a small amount of soluble metal-ion oxidizer/polishing accelerator, a metal-ion polishing accelerator bound to particles such as to abrasive particles, or both; and 5) at least one of the group selected from a) a small amount of a chelator, b) a small amount of a dihydroxy enolic compound, and c) a small amount of an organic accelerator. Ascorbic acid in an amount less than 800 ppm, preferably between about 100 ppm and 500 ppm, is the preferred dihydroxy enolic compound. The polishing compositions and processes are useful for substantially all metals and metallic compounds found in integrated circuits, but is particularly useful for tungsten. The present invention also pertains to surface-modified colloidal abrasive polishing compositions and associated methods of using these compositions, particularly for chemical mechanical planarization, wherein the slurry comprises low levels of chelating free radical quenchers, non-chelating free radical quenchers, or both.
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