发明授权
- 专利标题: Photoresist stripping solution
- 专利标题(中): 光阻剥离溶液
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申请号: US12585973申请日: 2009-09-30
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公开(公告)号: US08114825B2公开(公告)日: 2012-02-14
- 发明人: Shigeru Yokoi , Atsushi Yamanouchi
- 申请人: Shigeru Yokoi , Atsushi Yamanouchi
- 申请人地址: JP Kanagawa
- 专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人: Tokyo Ohka Kogyo Co., Ltd.
- 当前专利权人地址: JP Kanagawa
- 代理机构: Wenderoth, Lind & Ponack, L.L.P.
- 优先权: JP2005-140384 20050512
- 主分类号: C11D7/50
- IPC分类号: C11D7/50
摘要:
Disclosed is a photoresist stripping solution consisting essentially of (a) a quaternary ammonium hydroxide (e.g., tetramethylammonium hydroxide), (b) at least one water-soluble organic solvent selected from glycols and glycol ethers (e.g., propylene glycol, ethylene glycol, diethylene glycol monobutyl ether), and (c) a non-amine water-soluble organic solvent (e.g., dimethyl sulfoxide, N-methyl-2-pyrrolidone). The photoresist stripping solution of the invention has an excellent photoresist strippability, not causing damage of swelling/coloration to acrylic transparent films used in production of liquid-crystal panels and not causing damage to electrode materials. In particular, it has an excellent photoresist strippability to remove even a thick-film negative photoresist (photosensitive dry film) used in production of semiconductor chip packages (especially, wafer-level chip size packages, W-CSP), not causing damage to copper.
公开/授权文献
- US20100022426A1 Photoresist stripping solution 公开/授权日:2010-01-28
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