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US08115576B2 MEMS actuators and switches 有权
MEMS执行器和开关

MEMS actuators and switches
Abstract:
MEMS structures employing movable conductive member and a number of current-carrying stationary contact terminals which advantageously permit higher current carrying capability that prior art devices in which currents flowed through movable conductive members. Current carrying capability in excess of 1.0 amp without the need for additional current limiting devices is realized thereby lowering overall system manufacturing costs for systems employing our structures.
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