发明授权
- 专利标题： MEMS actuators with stress releasing design
- 专利标题（中）： 具有应力释放设计的MEMS致动器
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申请号： US12839708申请日： 2010-07-20
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公开(公告)号： US08115579B2公开(公告)日： 2012-02-14
- 发明人: Stéphane Mènard , Nicolas Gonon
- 申请人： Stéphane Mènard , Nicolas Gonon
- 申请人地址： CA Montreal
- 专利权人： Reseaux MEMS, societe en commandite
- 当前专利权人： Reseaux MEMS, societe en commandite
- 当前专利权人地址： CA Montreal
- 代理机构： Fasken Martineau DuMoulin LLP
- 代理商 Alexandre Abecassis
- 主分类号： H01H51/22
- IPC分类号： H01H51/22
摘要：
The micro-electromechanical (MEMS) actuator comprises a hot arm member and a cold arm member. The cold arm member comprises at least two longitudinally spaced-apart flexors. The actuators may also be constructed with at least one among the hot arm member and the cold arm member comprising at least one spring section. The stress in this improved MEMS actuator is more uniformly distributed, thereby reducing the mechanical creep and improving its reliability as well as its operation life.
公开/授权文献
- US20110012705A1 MEMS ACTUATORS WITH STRESS RELEASING DESIGN 公开/授权日：2011-01-20
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