发明授权
US08115986B2 Mirror device comprising drive electrode equipped with stopper function 有权
镜装置包括装有止动器功能的驱动电极

Mirror device comprising drive electrode equipped with stopper function
摘要:
The present invention provides a mirror device, comprising: a plurality of deflectable mirrors; an elastic member for supporting the mirror and to deflect the mirror to a range of deflecting angles; a drive electrode for driving the mirror; a control circuit for giving electric charge to the drive electrode and controlling the deflecting direction of the mirror; and a substrate on which the drive electrode and the elastic member, wherein the drive electrode is placed within an area on the substrate the mirror is projected on, has an outer form constituted by sides approximately in parallel to the outer peripheral lines of the present mirror and by sides approximately parallel to the deflection axis of the present mirror, or a form obtained by dividing the aforementioned outer form into a plurality thereof, and also fills the role of a stopper for regulating the deflection angle of the mirror.
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