Invention Grant
- Patent Title: System and method for micro-electromechanical operation of an interferometric modulator
- Patent Title (中): 用于干涉式调制器的微机电操作的系统和方法
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Application No.: US12241600Application Date: 2008-09-30
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Publication No.: US08115988B2Publication Date: 2012-02-14
- Inventor: Clarence Chui , William J Cummings , Brian J Gally , Ming-Hau Tung
- Applicant: Clarence Chui , William J Cummings , Brian J Gally , Ming-Hau Tung
- Applicant Address: US CA San Diego
- Assignee: Qualcomm MEMS Technologies, Inc.
- Current Assignee: Qualcomm MEMS Technologies, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Knobbe Martens Olson & Bear LLP
- Main IPC: G02B26/00
- IPC: G02B26/00
Abstract:
An interferometric modulator is formed by a stationary layer and a mirror facing the stationary layer. The mirror is movable between the undriven and driven positions. Landing pads, bumps or spring clips are formed on at least one of the stationary layer and the mirror. The landing pads, bumps or spring clips can prevent the stationary layer and the mirror from contacting each other when the mirror is in the driven position. The spring clips exert force on the mirror toward the undriven position when the mirror is in the driven position and in contact with the spring clips.
Public/Granted literature
- US20090022884A1 SYSTEM AND METHOD FOR MICRO-ELECTROMECHANICAL OPERATION OF AN INTERFEROMETRIC MODULATOR Public/Granted day:2009-01-22
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