发明授权
US08118169B2 Retainer and substrate storage container provided with same retainer
有权
保持器和具有相同保持器的基板存储容器
- 专利标题: Retainer and substrate storage container provided with same retainer
- 专利标题(中): 保持器和具有相同保持器的基板存储容器
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申请号: US12921411申请日: 2009-04-10
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公开(公告)号: US08118169B2公开(公告)日: 2012-02-21
- 发明人: Masato Hosoi , Takayuki Nakayama
- 申请人: Masato Hosoi , Takayuki Nakayama
- 申请人地址: JP Tokyo
- 专利权人: Shin-Etsu Polymer Co., Ltd.
- 当前专利权人: Shin-Etsu Polymer Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Osha • Liang LLP
- 优先权: JP2008-115667 20080425
- 国际申请: PCT/JP2009/057341 WO 20090410
- 国际公布: WO2009/131016 WO 20091029
- 主分类号: B65D85/30
- IPC分类号: B65D85/30
摘要:
When the position of a substrate is shifted, the substrate is made to return to an original position by enabling the position of the substrate to be controlled using an elastic piece which protrudes inside from a vertical direction part of a frame. Further, a coupling piece is provided extending in a vertical direction and having both ends thereof coupled to a horizontal direction part of the frame, and a protruding part protruding inside a substrate container is provided on the coupling piece. Then, this protruding part is configured to have an inclined face which is inclined in a direction intersecting the substrate and enabled to come into contact with the periphery of the substrate, and thereby this inclined face guides the substrate to reduce the friction of the substrate and to control the position of the substrate.
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