发明授权
US08118169B2 Retainer and substrate storage container provided with same retainer 有权
保持器和具有相同保持器的基板存储容器

Retainer and substrate storage container provided with same retainer
摘要:
When the position of a substrate is shifted, the substrate is made to return to an original position by enabling the position of the substrate to be controlled using an elastic piece which protrudes inside from a vertical direction part of a frame. Further, a coupling piece is provided extending in a vertical direction and having both ends thereof coupled to a horizontal direction part of the frame, and a protruding part protruding inside a substrate container is provided on the coupling piece. Then, this protruding part is configured to have an inclined face which is inclined in a direction intersecting the substrate and enabled to come into contact with the periphery of the substrate, and thereby this inclined face guides the substrate to reduce the friction of the substrate and to control the position of the substrate.
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