发明授权
US08118290B2 Method for holding wafers and device for fixing two parallel arranged wafers relative to one another
有权
用于保持晶片的方法和用于相对于彼此固定两个平行布置的晶片的装置
- 专利标题： Method for holding wafers and device for fixing two parallel arranged wafers relative to one another
- 专利标题（中）： 用于保持晶片的方法和用于相对于彼此固定两个平行布置的晶片的装置
-
申请号： US11749294申请日： 2007-05-16
-
公开(公告)号： US08118290B2公开(公告)日： 2012-02-21
- 发明人: Erich Thallner
- 申请人： Erich Thallner
- 代理机构： Kusner & Jaffe
- 优先权： DE102006026331 20060602
- 主分类号： B25B11/00
- IPC分类号： B25B11/00 ; B65D85/00 ; B65D81/07
摘要：
The invention relates to a device having a first holding instrument (1) for a first wafer (5) and having a second holding instrument (7) for a second wafer (9) arrangeable parallel to the first wafer (5), the two holding instruments (1, 7) being fixable relative to one another. According to the invention, at least one of the holding instruments (1, 7), preferably both holding instruments (1, 7) respectively, comprises at least one gel film (2, 8) for holding the associated wafer (5, 9). The invention furthermore relates to the use of a gel film for holding integral wafers.
公开/授权文献
信息查询
