发明授权
- 专利标题: Temperature control unit for bubblers
- 专利标题(中): 起泡器温度控制单元
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申请号: US11378664申请日: 2006-03-17
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公开(公告)号: US08118939B2公开(公告)日: 2012-02-21
- 发明人: Boris Atlas , Yefim Bichutskiy , Boris Bruk
- 申请人: Boris Atlas , Yefim Bichutskiy , Boris Bruk
- 申请人地址: US CA Morgan Hill
- 专利权人: Noah Precision, LLC
- 当前专利权人: Noah Precision, LLC
- 当前专利权人地址: US CA Morgan Hill
- 代理机构: Dorsey & Whitney LLP
- 主分类号: C23C16/00
- IPC分类号: C23C16/00 ; B01D47/00
摘要:
A temperature control device for use in a process reactor system with a bubbler having a container provided with a side wall. The device includes a vessel having an internal chamber adapted to receive the container of the bubbler. An enclosure member is extendable between the container of the bubbler and the vessel for enclosing the side wall of the container within the internal chamber. A temperature-changing device is coupled to the vessel for providing heat or cold to the internal chamber.
公开/授权文献
- US20060213446A1 Temperature control unit for bubblers 公开/授权日:2006-09-28
信息查询
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