发明授权
- 专利标题: Method for manufacturing electronic device
- 专利标题(中): 电子设备制造方法
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申请号: US11826922申请日: 2007-07-19
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公开(公告)号: US08119020B2公开(公告)日: 2012-02-21
- 发明人: Shoko Ito , Makiko Katano , Atsuko Kawasaki , Masahiro Kiyotoshi
- 申请人: Shoko Ito , Makiko Katano , Atsuko Kawasaki , Masahiro Kiyotoshi
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Finnegan, Henderson, Farabow, Garrett & Dunner, L.L.P.
- 优先权: JP2006-198481 20060720
- 主分类号: B44C1/22
- IPC分类号: B44C1/22
摘要:
A method for manufacturing an electronic device using a closed-type transport container, includes: controlling relative humidity inside the closed-type transport container to be lower than ambient relative humidity outside the closed-type transport container on a particular interprocess transport path in which an intermediate product stored in the closed-type transport container is transported from a first manufacturing process to a second manufacturing process. The first manufacturing process allows basic compounds containing nitrogen atoms to be released from the intermediate product. The second manufacturing process is susceptible to degradation due to contamination by the basic compounds.
公开/授权文献
- US20080023442A1 Method for manufacturing electronic device 公开/授权日:2008-01-31
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