- 专利标题: Flexible substrate, method of fabricating the same, and thin film transistor using the same
-
申请号: US12379648申请日: 2009-02-26
-
公开(公告)号: US08119250B2公开(公告)日: 2012-02-21
- 发明人: Jae-Seob Lee , Dong-Un Jin , Yeon-Gon Mo , Tae-Woong Kim
- 申请人: Jae-Seob Lee , Dong-Un Jin , Yeon-Gon Mo , Tae-Woong Kim
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Mobile Display Co., Ltd.
- 当前专利权人: Samsung Mobile Display Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Lee & Morse, P.C.
- 优先权: KR10-2008-0018873 20080229
- 主分类号: B32B15/04
- IPC分类号: B32B15/04 ; H05H1/24
摘要:
A flexible substrate for a TFT includes a metal substrate having a predetermined coefficient of thermal expansion, and a buffer layer on the metal substrate, the buffer layer including a silicon oxide or a silicon nitride, wherein the predetermined coefficient of thermal expansion of the metal substrate satisfies an equation as follows, α f + 0.162 × ( 1 - v f ) E f ≤ α s ≤ α f + 0.889 × ( 1 - v f ) E f Ef representing Young's modulus of the buffer layer, vf representing Poisson's ratio of the buffer layer, αf representing a coefficient of thermal expansion of the buffer layer, and αs representing the predetermined coefficient of thermal expansion of the metal substrate.
公开/授权文献
信息查询