发明授权
- 专利标题: Method of forming magnetic memory device
- 专利标题(中): 形成磁存储器件的方法
-
申请号: US12655862申请日: 2010-01-08
-
公开(公告)号: US08119425B2公开(公告)日: 2012-02-21
- 发明人: Woojin Cho , Jaeseung Hwang , Sukhun Choi , Dae Kyom Kim , JungHyeon Kim
- 申请人: Woojin Cho , Jaeseung Hwang , Sukhun Choi , Dae Kyom Kim , JungHyeon Kim
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Onello & Mello, LLP
- 优先权: KR10-2009-0001981 20090109
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
There are provided a magnetic memory device and a method of forming the magnetic memory device. The method of forming the magnetic memory device includes sequentially forming a first magnetic conductor, a tunnel barrier layer, and a second magnetic conductor on a substrate, forming a mask pattern on the second magnetic conductor, performing a primary etching of the second magnetic conductor by using the mask pattern as an etching mask, forming at least one spacer on sidewalls of the second magnetic conductor formed by the primary etching, and performing a secondary etching of the first magnetic conductor by using the mask pattern and the at least one spacers as an etching mask.
公开/授权文献
- US20100178714A1 Method of forming magnetic memory device 公开/授权日:2010-07-15
信息查询
IPC分类: