发明授权
US08119429B2 Method for fabricating nitride semiconductor laser device and nitride semiconductor laser device 失效
氮化物半导体激光器件和氮化物半导体激光器件的制造方法

Method for fabricating nitride semiconductor laser device and nitride semiconductor laser device
摘要:
A p-type GaN guiding layer, an n-type GaN layer, and an n-type AlGaN current blocking layer are sequentially formed over an active layer, and then part of the current blocking layer is etched by using an alkali solution and irradiating the part with light to form an opening. Thereafter, a second p-type GaN guiding layer is formed on the current blocking layer to cover the opening. In this structure, the GaN layer has a smaller energy gap than the AlGaN current blocking layer.
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