发明授权
US08119429B2 Method for fabricating nitride semiconductor laser device and nitride semiconductor laser device
失效
氮化物半导体激光器件和氮化物半导体激光器件的制造方法
- 专利标题: Method for fabricating nitride semiconductor laser device and nitride semiconductor laser device
- 专利标题(中): 氮化物半导体激光器件和氮化物半导体激光器件的制造方法
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申请号: US11953459申请日: 2007-12-10
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公开(公告)号: US08119429B2公开(公告)日: 2012-02-21
- 发明人: Satoshi Tamura , Hiroshi Ohno , Norio Ikedo , Masao Kawaguchi
- 申请人: Satoshi Tamura , Hiroshi Ohno , Norio Ikedo , Masao Kawaguchi
- 申请人地址: JP Osaka
- 专利权人: Pansonic Corporation
- 当前专利权人: Pansonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: McDermott Will & Emery LLP
- 优先权: JP2006-335528 20061213
- 主分类号: H01L21/302
- IPC分类号: H01L21/302 ; H01L21/461
摘要:
A p-type GaN guiding layer, an n-type GaN layer, and an n-type AlGaN current blocking layer are sequentially formed over an active layer, and then part of the current blocking layer is etched by using an alkali solution and irradiating the part with light to form an opening. Thereafter, a second p-type GaN guiding layer is formed on the current blocking layer to cover the opening. In this structure, the GaN layer has a smaller energy gap than the AlGaN current blocking layer.
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