发明授权
- 专利标题： Method of manufacturing thin film transistor substrate and method of manufacturing organic light emitting display apparatus
- 专利标题（中）： 制造薄膜晶体管基板的方法和制造有机发光显示装置的方法
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申请号： US12699196申请日： 2010-02-03
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公开(公告)号： US08119467B2公开(公告)日： 2012-02-21
- 发明人: Ae-Kyung Kwon , Won-Kyu Kwak
- 申请人： Ae-Kyung Kwon , Won-Kyu Kwak
- 申请人地址： KR Yongin
- 专利权人： Samsung Mobile Display Co., Ltd.
- 当前专利权人： Samsung Mobile Display Co., Ltd.
- 当前专利权人地址： KR Yongin
- 代理机构： Christie, Parker & Hale, LLP
- 优先权： KR10-2009-0028540 20090402
- 主分类号： H01L21/84
- IPC分类号： H01L21/84
摘要：
Provided are a method of manufacturing a thin film transistor (TFT) substrate and a method of manufacturing an organic light emitting display apparatus, which increase the capacitance of a capacitor without increasing the probability of short circuits between wires. The method of manufacturing a TFT substrate includes (a) forming a capacitor electrode and a gate electrode on a substrate having a first region and a second region, so that the capacitor electrode is formed to correspond to the first region and the gate electrode is formed in a portion of the second region; (b) forming an interlayer insulating layer to cover the gate electrode and the capacitor electrode; and (c) etching a portion of the interlayer insulating layer in the first region by using a halftone mask to a thickness that is less than a thickness of a portion of the interlayer insulating layer in the second region.
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