发明授权
- 专利标题: Phase change memory devices and their methods of fabrication
- 专利标题(中): 相变存储器件及其制造方法
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申请号: US12544104申请日: 2009-08-19
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公开(公告)号: US08120005B2公开(公告)日: 2012-02-21
- 发明人: Jae-Hyun Park , Jae-Hee Oh , Se-Ho Lee , Won-Cheol Jeong
- 申请人: Jae-Hyun Park , Jae-Hee Oh , Se-Ho Lee , Won-Cheol Jeong
- 申请人地址: KR Suwon-Si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-Si
- 代理机构: F. Chau & Associates, LLC
- 优先权: KR2005-32898 20050420
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
In an embodiment, a phase change memory device includes a semiconductor substrate of a first conductivity type and a first interlayer insulating layer disposed on the semiconductor substrate. A hole penetrates the first interlayer insulating layer. A first and a second semiconductor pattern are sequentially stacked in a lower region of the hole. A cell electrode is provided on the second semiconductor pattern. The cell electrode has a lower surface than a top surface of the first interlayer insulating layer. A confined phase change material pattern fills the hole on the cell electrode. An upper electrode is disposed on the phase change material pattern. The phase change material pattern in the hole is self-aligned with the first and second semiconductor patterns by the hole. A method of fabricating the phase change memory device is also provided.
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