发明授权
US08122389B2 Apparatus and method for segmenting edges for optical proximity correction
有权
用于光学邻近校正的边缘分割的装置和方法
- 专利标题： Apparatus and method for segmenting edges for optical proximity correction
- 专利标题（中）： 用于光学邻近校正的边缘分割的装置和方法
-
申请号： US12690791申请日： 2010-01-20
-
公开(公告)号： US08122389B2公开(公告)日： 2012-02-21
- 发明人: Abdurrahman Sezginer , Bayram Yenikaya , Hsu-Ting Huang
- 申请人： Abdurrahman Sezginer , Bayram Yenikaya , Hsu-Ting Huang
- 申请人地址： US CA San Jose
- 专利权人： Cadence Design Systems, Inc.
- 当前专利权人： Cadence Design Systems, Inc.
- 当前专利权人地址： US CA San Jose
- 代理机构： Kenyon & Kenyon LLP
- 主分类号： G06F17/50
- IPC分类号： G06F17/50
摘要：
An apparatus and method for modifying a mask data set includes calculating a derivative of a figure-of-merit, indicative of a data set defined by a plurality of polygon edges and then segmenting polygon edges in response to said step of calculating.
公开/授权文献
信息查询
