- 专利标题: Method for forming quantum well structure and method for manufacturing semiconductor light emitting element
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申请号: US12417857申请日: 2009-04-03
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公开(公告)号: US08124430B2公开(公告)日: 2012-02-28
- 发明人: Yohei Enya , Yusuke Yoshizumi , Masaki Ueno , Fumitake Nakanishi
- 申请人: Yohei Enya , Yusuke Yoshizumi , Masaki Ueno , Fumitake Nakanishi
- 申请人地址: JP Osaka-shi
- 专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人: Sumitomo Electric Industries, Ltd.
- 当前专利权人地址: JP Osaka-shi
- 代理机构: Venable LLP
- 代理商 Michael A. Sartori; Michael E. Nelson
- 优先权: JP2008-101781 20080409
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A method for forming a quantum well structure that can reduce the variation in the In composition in the thickness direction of a well layer and a method for manufacturing a semiconductor light emitting element are provided. In a step of forming a quantum well structure (active layer) by alternately growing barrier layers and well layers on a primary surface of a GaN substrate, the well layers are each formed by growing InGaN, the barrier layers are each grown at a first temperature, the well layers are each grown at a second temperature which is lower than that of the first temperature, and when the well layers are each formed, before a starting material gas for Ga (trimethylgallium) is supplied, a starting material gas for In is supplied.
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