发明授权
- 专利标题: Substrate detection device and substrate conveyance apparatus
- 专利标题(中): 基板检测装置和基板输送装置
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申请号: US12864785申请日: 2009-01-14
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公开(公告)号: US08125651B2公开(公告)日: 2012-02-28
- 发明人: Shuzo Yagi , Masao Nakane , Yoshinori Isobata
- 申请人: Shuzo Yagi , Masao Nakane , Yoshinori Isobata
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Pearne & Gordon LLP
- 优先权: JP2008-016114 20080128
- 国际申请: PCT/JP2009/000115 WO 20090114
- 国际公布: WO2009/096142 WO 20090806
- 主分类号: G01B11/14
- IPC分类号: G01B11/14
摘要:
An object is to provide a substrate conveyance apparatus and a substrate detection device capable of improving flexibility in arrangement layout.The substrate detection device includes a projector 41 for projecting inspection light 40 so as to pass through a predetermined position on a path of a substrate 4 conveyed by conveyance belts 26, a light receiver 42 for receiving the inspection light 40 projected by the projector 41, and a detector (a control device 15) for detecting that the substrate 4 reaches the predetermined position based on a decrease in the amount of received light of the inspection light 40 received by the light receiver 42 when the substrate 4 conveyed by the conveyance belts 26 reaches the predetermined position and a portion of the inspection light 40 is blocked by the substrate 4. The inspection light 40 is projected from the projector 41 so as to include opposite ends of a width direction of the conveyance belts 26 in an optical path of the inspection light in a direction orthogonal to a conveyance direction of the substrate 4 conveyed by the conveyance belts 26 and the light receiver 42 receives the inspection light passing through upper and lower regions of the conveyance belts 26 in the width direction.
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