发明授权
- 专利标题： Line narrowing module
- 专利标题（中）： 线窄模块
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申请号： US13086858申请日： 2011-04-14
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公开(公告)号： US08126027B2公开(公告)日： 2012-02-28
- 发明人: J. Martin Algots , Robert A. Bergstedt , William N. Partlo , German E. Rylov , Richard L. Sandstrom
- 申请人： J. Martin Algots , Robert A. Bergstedt , William N. Partlo , German E. Rylov , Richard L. Sandstrom
- 申请人地址： US CA San Diego
- 专利权人： Cymer, Inc.
- 当前专利权人： Cymer, Inc.
- 当前专利权人地址： US CA San Diego
- 代理机构： DiBerardino Law LLC
- 主分类号： H01S3/22
- IPC分类号： H01S3/22
摘要：
An apparatus is disclosed which may comprise a grating receiving light, a first prism moveable to coarsely select an angle of incidence of the light on the grating, and a second prism moveable to finely select an angle of incidence of the light on the grating. In one application, the apparatus may be used as a line narrowing module for a laser light source.
公开/授权文献
- US20110194580A1 Line Narrowing Module 公开/授权日：2011-08-11
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