Invention Grant
US08126669B2 Optimization and matching of optical systems by use of orientation Zernike polynomials
有权
通过使用方位泽尔尼克多项式优化和匹配光学系统
- Patent Title: Optimization and matching of optical systems by use of orientation Zernike polynomials
- Patent Title (中): 通过使用方位泽尔尼克多项式优化和匹配光学系统
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Application No.: US12421996Application Date: 2009-04-10
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Publication No.: US08126669B2Publication Date: 2012-02-28
- Inventor: Michael Totzeck , Daniel Kraehmer , Ralf Mueller , Johannes Ruoff , Vladan Blahnik
- Applicant: Michael Totzeck , Daniel Kraehmer , Ralf Mueller , Johannes Ruoff , Vladan Blahnik
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G01D18/00
- IPC: G01D18/00 ; G01B9/00

Abstract:
The present disclosure relates to specification, optimization and matching of optical systems by use of orientation Zernike polynomials. In some embodiments, a method for assessing the suitability of an optical system of a microlithographic projection exposure apparatus is provided. The method can include determining a Jones pupil of the optical system, at least approximately describing the Jones pupil using an expansion into orientation Zernike polynomials, and assessing the suitability of the optical system on the basis of the expansion coefficient of at least one of the orientation Zernike polynomials in the expansion.
Public/Granted literature
- US20090306921A1 SPECIFICATION, OPTIMIZATION AND MATCHING OF OPTICAL SYSTEMS BY USE OF ORIENTATIONAL ZERNIKE POLYNOMIALS Public/Granted day:2009-12-10
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