发明授权
US08126669B2 Optimization and matching of optical systems by use of orientation Zernike polynomials
有权
通过使用方位泽尔尼克多项式优化和匹配光学系统
- 专利标题: Optimization and matching of optical systems by use of orientation Zernike polynomials
- 专利标题(中): 通过使用方位泽尔尼克多项式优化和匹配光学系统
-
申请号: US12421996申请日: 2009-04-10
-
公开(公告)号: US08126669B2公开(公告)日: 2012-02-28
- 发明人: Michael Totzeck , Daniel Kraehmer , Ralf Mueller , Johannes Ruoff , Vladan Blahnik
- 申请人: Michael Totzeck , Daniel Kraehmer , Ralf Mueller , Johannes Ruoff , Vladan Blahnik
- 申请人地址: DE Oberkochen
- 专利权人: Carl Zeiss SMT GmbH
- 当前专利权人: Carl Zeiss SMT GmbH
- 当前专利权人地址: DE Oberkochen
- 代理机构: Fish & Richardson P.C.
- 主分类号: G01D18/00
- IPC分类号: G01D18/00 ; G01B9/00
摘要:
The present disclosure relates to specification, optimization and matching of optical systems by use of orientation Zernike polynomials. In some embodiments, a method for assessing the suitability of an optical system of a microlithographic projection exposure apparatus is provided. The method can include determining a Jones pupil of the optical system, at least approximately describing the Jones pupil using an expansion into orientation Zernike polynomials, and assessing the suitability of the optical system on the basis of the expansion coefficient of at least one of the orientation Zernike polynomials in the expansion.
公开/授权文献
信息查询