发明授权
- 专利标题: Nonvolatile memory device and method of manufacturing the same
- 专利标题(中): 非易失性存储器件及其制造方法
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申请号: US12434633申请日: 2009-05-02
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公开(公告)号: US08129705B2公开(公告)日: 2012-03-06
- 发明人: Masaharu Kinoshita , Yoshitaka Sasago , Norikatsu Takaura
- 申请人: Masaharu Kinoshita , Yoshitaka Sasago , Norikatsu Takaura
- 申请人地址: JP Tokyo
- 专利权人: Hitachi, Ltd.
- 当前专利权人: Hitachi, Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Miles & Stockbridge P.C.
- 优先权: JP2008-202771 20080806
- 主分类号: H01L45/00
- IPC分类号: H01L45/00
摘要:
Provided is a nonvolatile memory device including a phase-change memory configured with cross-point memory cells in which memory elements formed of a phase-change material and selection elements formed with a diode are combined. A memory cell is configured with a memory element formed of a phase-change material and a selection element formed with a diode having a stacked structure of a first polycrystalline silicon film, a second polycrystalline silicon film, and a third polycrystalline silicon film. The memory cells are arranged at intersection points of a plurality of first metal wirings extending along a first direction with a plurality of third metal wirings extending along a second direction orthogonal to the first direction. An interlayer film is formed between adjacent selection elements and between adjacent memory elements, and voids are formed in the interlayer film provided between the adjacent memory elements.
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