Invention Grant
- Patent Title: Phase retardance inspection instrument
- Patent Title (中): 相位延迟检测仪
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Application No.: US12367157Application Date: 2009-02-06
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Publication No.: US08130378B2Publication Date: 2012-03-06
- Inventor: Chun-I Wu , Kai-Ping Chuang , Wan-Yi Lin , Yi-Chen Hsieh , Fu-Shiang Yang
- Applicant: Chun-I Wu , Kai-Ping Chuang , Wan-Yi Lin , Yi-Chen Hsieh , Fu-Shiang Yang
- Applicant Address: TW Hsin-Chu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsin-Chu
- Agency: Morris Manning & Martin LLP
- Agent Tim Tingkang Xia, Esq.
- Priority: TW97143455A 20081111
- Main IPC: G01J4/00
- IPC: G01J4/00

Abstract:
A phase retardance inspection instrument, comprising: a light source module for generating a single-wavelength light beam; a circularly polarized light generating module, comprising a polarizer and a first phase retarder, for receiving the single-wavelength light beam as it is guided to pass through the polarizer and the first phase retarder in order; and a detecting module, comprising a second phase retarder, a polarizing beam splitter, a first image sensor and a second image sensor, for receiving and guiding a circularly polarized light beam to travel through the second phase retarder and the polarizing beam splitter in order after it passes through a substrate under inspection, wherein the polarizing beam splitter splits an elliptically polarized light beam into intensity vector components of a left-hand circularly polarized light beam and a right-hand circularly polarized light beam, which are to be emitted into the first image sensor and the second image sensor, respectively.
Public/Granted literature
- US20100118293A1 PHASE RETARDANCE INSPECTION INSTRUMENT Public/Granted day:2010-05-13
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